1. In doc https://docs.openshift.com/container-platform/4.16/machine_management/creating_machinesets/creating-machineset-vsphere.html#machineset-yaml-vsphere_creating-machineset-vsphere shows

      providerSpec:
        value:
          apiVersion: vsphereprovider.openshift.io/v1beta1

Seems vsphereprovider.openshift.io/v1beta1 should be machine.openshift.io/v1beta1, because I checked on a 4.16 vSphere cluster, it's machine.openshift.io/v1beta1 in the default machine set.

2. In doc https://docs.openshift.com/container-platform/4.16/machine_management/creating_machinesets/creating-machineset-vsphere.html#compute-machineset-upi-reqs_creating-machineset-vsphere under Satisfying Ignition configuration requirements
shows

By default, this configuration is stored in the worker-user-data secret in the machine-api-operator namespace. Compute machine sets reference the secret during the machine creation process.

machine-api-operator namespace is not right, should be openshift-machine-api namespace

3. In doc https://docs.openshift.com/container-platform/4.16/machine_management/creating_machinesets/creating-machineset-vsphere.html#machineset-creating_creating-machineset-vsphere under
c. If you are creating a compute machine set for a cluster that has user-provisioned infrastructure, note the following important values:
the "Example vSphere providerSpec values" shows

apiVersion: machine.openshift.io/v1beta1
kind: MachineSet
...
template:
  ...
  spec:
    providerSpec:
      value:
        apiVersion: machine.openshift.io/v1beta1

it's missing spec layer, should be

apiVersion: machine.openshift.io/v1beta1
kind: MachineSet
...
spec:
  template:
    ...
    spec:
      providerSpec:
        value:
          apiVersion: machine.openshift.io/v1beta1

    4.16

    1.
    2.
    3.