For doc https://docs.openshift.com/container-platform/4.16/machine_management/control_plane_machine_management/cpmso_provider_configurations/cpmso-config-options-azure.html#cpmso-yaml-provider-spec-azure_cpmso-config-options-azure 

For part "Sample Azure provider specification"
1. we'd better change
spec:
# ...
  template:
# ...
      spec:
        providerSpec:
to 
spec:
# ...
  template:
# ...
    machines_v1beta1_machine_openshift_io:
# ...
      spec:
        providerSpec:

2. gallery_<cluster_id> is not correct, for example cluster_id is lhy-416-azur-arm-78jhq, here use underscores lhy_416_azur_arm_78jhq.
resourceID: /resourceGroups/<cluster_id>-rg/providers/Microsoft.Compute/galleries/gallery_<cluster_id>/images/<cluster_id>-gen2/versions/412.86.20220930 

the correct one:
resourceID: /resourceGroups/lhy-416-azur-arm-78jhq-rg/providers/Microsoft.Compute/galleries/gallery_lhy_416_azur_arm_78jhq/images/lhy-416-azur-arm-78jhq-gen2/versions/latest
 
3. remove name: <cluster_id> 
            metadata:
              creationTimestamp: null
              name: <cluster_id>  

4. Should change
            osDisk: 
              diskSettings: {}
              diskSizeGB: 1024
              managedDisk:
                storageAccountType: Premium_LRS
              osType: Linux
to 
            osDisk:
              diskSettings: {}
              diskSizeGB: 1024
              managedDisk:
                securityProfile:
                  diskEncryptionSet: {}
                storageAccountType: Premium_LRS
              osType: Linux

5. Add the following two lines to the line below resourceGroup
            securityProfile:
              settings: {}

The whole cpms on azure looks like:
$ oc get controlplanemachineset cluster -n openshift-machine-api -o yaml     
apiVersion: machine.openshift.io/v1
kind: ControlPlaneMachineSet
metadata:
  labels:
    machine.openshift.io/cluster-api-cluster: oadp-92911-scgpd
  name: cluster
  namespace: openshift-machine-api
spec:
  replicas: 3
  selector:
    matchLabels:
      machine.openshift.io/cluster-api-cluster: oadp-92911-scgpd
      machine.openshift.io/cluster-api-machine-role: master
      machine.openshift.io/cluster-api-machine-type: master
  state: Active
  strategy:
    type: RollingUpdate
  template:
    machineType: machines_v1beta1_machine_openshift_io
    machines_v1beta1_machine_openshift_io:
      failureDomains:
        azure:
        - zone: "1"
        - zone: "2"
        - zone: "3"
        platform: Azure
      metadata:
        labels:
          machine.openshift.io/cluster-api-cluster: oadp-92911-scgpd
          machine.openshift.io/cluster-api-machine-role: master
          machine.openshift.io/cluster-api-machine-type: master
      spec:
        lifecycleHooks: {}
        metadata: {}
        providerSpec:
          value:
            acceleratedNetworking: true
            apiVersion: machine.openshift.io/v1beta1
            credentialsSecret:
              name: azure-cloud-credentials
              namespace: openshift-machine-api
            diagnostics: {}
            image:
              offer: ""
              publisher: ""
              resourceID: /resourceGroups/oadp-92911-scgpd-rg/providers/Microsoft.Compute/galleries/gallery_oadp_92911_scgpd/images/oadp-92911-scgpd-gen2/versions/latest
              sku: ""
              version: ""
            internalLoadBalancer: oadp-92911-scgpd-internal
            kind: AzureMachineProviderSpec
            location: eastus
            managedIdentity: oadp-92911-scgpd-identity
            metadata:
              creationTimestamp: null
            networkResourceGroup: oadp-92911-scgpd-rg
            osDisk:
              diskSettings: {}
              diskSizeGB: 1024
              managedDisk:
                securityProfile:
                  diskEncryptionSet: {}
                storageAccountType: Premium_LRS
              osType: Linux
            publicIP: false
            publicLoadBalancer: oadp-92911-scgpd
            resourceGroup: oadp-92911-scgpd-rg
            securityProfile:
              settings: {}
            subnet: oadp-92911-scgpd-master-subnet
            userDataSecret:
              name: master-user-data
            vmSize: Standard_D8s_v3
            vnet: oadp-92911-scgpd-vnet